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The method according to claim 1, wherein the determining step includes determining the at least one of a position and a height of the at least one element using optical triangulation.Ĩ. The method according to claim 1, wherein the step of directing the laser beam having the second laser intensity includes directing the laser beam having the second laser intensity at an apex of the element.ħ. The method according to claim 1, wherein the step of directing the laser beam having the first laser beam intensity includes directing the laser beam having the first laser beam intensity to a position other than an apex of the element.Ħ. The method according to claim 1, wherein laser beam intensity is changed from the first laser beam intensity to the second laser beam intensity by an acousto-optical arrangement.ĥ. The method according to claim 1, wherein laser beam intensity is changed from the first laser beam intensity to the second laser beam intensity by an electro-optical arrangement.Ĥ.

The method according to claim 1, wherein laser beam intensity is changed from the first laser beam intensity to the second laser beam intensity by varying a drive current to the laser.ģ. A method of determining a height and/or position of at least one element on an area array device, comprising: directing a laser beam having a first laser beam intensity at the surface of the at least one element sampling light reflected from the at least one element, the reflected light resulting from the laser beam having the first laser beam intensity directing a laser beam having a second laser intensity at the at least one element, the second laser intensity being different than the first laser intensity sampling light reflected from the at least one element, the reflected light resulting from the laser beam having the second laser intensity and determining at least one of a position and a height of the at least one element as a function of the sampled reflected light resulting from the laser beam having the first laser beam intensity and the sampled reflected light resulting from the laser beam having the second laser beam intensity.Ģ.